JPH0519949Y2 - - Google Patents
Info
- Publication number
- JPH0519949Y2 JPH0519949Y2 JP1200090U JP1200090U JPH0519949Y2 JP H0519949 Y2 JPH0519949 Y2 JP H0519949Y2 JP 1200090 U JP1200090 U JP 1200090U JP 1200090 U JP1200090 U JP 1200090U JP H0519949 Y2 JPH0519949 Y2 JP H0519949Y2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- bell gear
- gas
- heating means
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 claims description 39
- 238000010438 heat treatment Methods 0.000 claims description 38
- 239000000112 cooling gas Substances 0.000 claims description 27
- 239000007789 gas Substances 0.000 claims description 22
- 238000002955 isolation Methods 0.000 claims description 18
- 230000001681 protective effect Effects 0.000 claims description 15
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 14
- 238000000034 method Methods 0.000 description 8
- 239000012495 reaction gas Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1200090U JPH0519949Y2 (en]) | 1990-02-09 | 1990-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1200090U JPH0519949Y2 (en]) | 1990-02-09 | 1990-02-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03102727U JPH03102727U (en]) | 1991-10-25 |
| JPH0519949Y2 true JPH0519949Y2 (en]) | 1993-05-25 |
Family
ID=31515501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1200090U Expired - Lifetime JPH0519949Y2 (en]) | 1990-02-09 | 1990-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519949Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6652655B1 (en) * | 2000-07-07 | 2003-11-25 | Applied Materials, Inc. | Method to isolate multi zone heater from atmosphere |
-
1990
- 1990-02-09 JP JP1200090U patent/JPH0519949Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03102727U (en]) | 1991-10-25 |
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